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Plasma etching an introduction ed. by Dennis M. Manos and Daniel L. Flamm.

Contributor(s): Material type: BookBookSeries: Plasma-Materials interactionsPublication details: Boston Academic press 1989Description: xii, 476pISBN:
  • 0124693709
Subject(s): DDC classification:
  • 530.44 N89
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Holdings
Item type Current library Call number Status Date due Barcode
Book Book JRD Tata Memorial Library 530.44 N89 (Browse shelf(Opens below)) Available 141583

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