Plasma etching (Record no. 1525)
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000 -LEADER | |
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fixed length control field | 00604nam a2200193Ia 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0124693709 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 530.44 |
Item number | N89 |
245 ## - TITLE STATEMENT | |
Title | Plasma etching |
Remainder of title | an introduction |
Statement of responsibility, etc. | ed. by Dennis M. Manos and Daniel L. Flamm. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Boston |
Name of publisher, distributor, etc. | Academic press |
Date of publication, distribution, etc. | 1989 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xii, 476p. |
490 ## - SERIES STATEMENT | |
Series statement | Plasma-Materials interactions |
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
Topical term or geographic name as entry element | Plasma etching |
700 ## - ADDED ENTRY--PERSONAL NAME | |
Personal name | Manos, Dennis M., ed. |
700 ## - ADDED ENTRY--PERSONAL NAME | |
Personal name | Flamm, Daniel L., ed. |
919 ## - | |
-- | 001550 |
964 ## - | |
-- | |
-- | 0 |
-- | |
-- | |
-- | |
-- | ED. |
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Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Koha item type |
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JRD Tata Memorial Library | JRD Tata Memorial Library | 24/05/1996 | 530.44 N89 | 141583 | Book |