Interlaboratory study on line width measurements for anti-reflective chromium photo masks by John M. Jerke, M. Carroll Croakin and Ruth N. Varner

By: Contributor(s): Material type: TextTextPublication details: Washington National Bureau of Standards 2983Description: vii, 183pDDC classification:
  • 621.381548 N822
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Item type Current library Call number Status Date due Barcode
Reference Reference JRD Tata Memorial Library 621.381548 N822 (Browse shelf(Opens below)) Not for loan 116744

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