Interlaboratory study on line width measurements for anti-reflective chromium photo masks (Record no. 66662)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381548 |
| Item number | N822 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Jerke, John M. |
| 245 ## - TITLE STATEMENT | |
| Title | Interlaboratory study on line width measurements for anti-reflective chromium photo masks |
| Remainder of title | |
| Statement of responsibility, etc. | by John M. Jerke, M. Carroll Croakin and Ruth N. Varner |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Washington |
| Name of publisher, distributor, etc. | National Bureau of Standards |
| Date of publication, distribution, etc. | 2983 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | vii, 183p. |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Croakin, M. Carroll. |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Varner, Ruth N. |
| 919 ## - | |
| -- | 069027 |
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