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1.
Plasma etching fundamentals and applications by M. Sugawara by
Material type: Text Text
Publication details: New York Oxford University Press 1998
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.381531 N98;2.

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2.
Plasma etching fundamentals and application by M. Sugawara et al by
Material type: Text Text
Publication details: New York Oxford Univ. Press 1998
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.381531 N98;1.

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3.
Plasma etching fundamentals and application by M Sugawara, et al by
Material type: Text Text
Publication details: New York Oxford Univ. Press 1998
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.381531 N98 "R(T)".

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