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Plasma etching fundamentals and applications by M. Sugawara

By: Material type: TextTextPublication details: New York Oxford University Press 1998Description: viii, 347pISBN:
  • 019856287X
Subject(s): DDC classification:
  • 621.381531 N98;2
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Item type Current library Call number Status Date due Barcode
Book Book JRD Tata Memorial Library 621.381531 N98;2 (Browse shelf(Opens below)) Available 180556

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