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Handbook of ion beam processing technology principles, deposition, film modification & synthesis ed. by Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kau. by Series: Materials science and process technology series
Material type: Text Text
Publication details: New Jersey Noyes Publications 1989
Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (1)Call number: 621.3817 N89.

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Thin films; V.26 PVD for microelectronics:Sputter deposition applied to semiconductor manufacturing by Ronald A. Powel, Stephen M. Rossnagel by
Material type: Text Text
Publication details: San Diego Academic Press 1999
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 530.4105 N63.26 "SER".

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