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	1.	Handbook of ion beam processing technology principles, deposition, film modification & synthesis ed. by Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kau. by Cuomo, Jerome J., ed Rossnagel, Stephen M., ed Kaufman, Harold R., ed Series: Materials science and process technology series Material type: Text Publication details: New Jersey Noyes Publications 1989 Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (1)Call number: 621.3817 N89.
	2.	Handbook of plasma processing technology fundamentals, etching, deposition and surface interactions ed. by Stephen M. Rossnagel, Jerome J. Cuomo, W. D. Westwood by Rossnagel, Stephen M., ed Cuomo, Jerome J., ed Westwoood, W. D., ed Series: Materials science and process technology series Material type: Text Publication details: Park Ridge Noyes publications 1990 Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.044 N90. Place hold
	3.	Thin films; V.26 PVD for microelectronics:Sputter deposition applied to semiconductor manufacturing by Ronald A. Powel, Stephen M. Rossnagel by Powel, Ronald A Rossnagel, Stephen M Material type: Text Publication details: San Diego Academic Press 1999 Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 530.4105 N63.26 "SER". Place hold

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