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Handbook of plasma processing technology fundamentals, etching, deposition and surface interactions ed. by Stephen M. Rossnagel, Jerome J. Cuomo, W. D. Westwood

Contributor(s): Material type: BookBookSeries: Materials science and process technology seriesPublication details: Park Ridge Noyes publications 1990Description: xxiii, 523pISBN:
  • 0815512201
Subject(s): DDC classification:
  • 621.044 N90
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Holdings
Item type Current library Call number Status Date due Barcode
Book Book JRD Tata Memorial Library 621.044 N90 (Browse shelf(Opens below)) Available 145275

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