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Thin films V.22:modeling of film deposition for microelectronic applications ed. by Stephen Rossnagel

Contributor(s): Material type: TextTextPublication details: San Diego Academic Press 1996Description: xiv, 291pISBN:
  • 0125330227
Subject(s): DDC classification:
  • 530.4106 N63.21 "SER"
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Item type Current library Call number Status Date due Barcode
S S JRD Tata Memorial Library 530.4106 N63.21 "SER" (Browse shelf(Opens below)) Available 158466

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