Thin films V.22:modeling of film deposition for microelectronic applications
Thin films V.22:modeling of film deposition for microelectronic applications
ed. by Stephen Rossnagel
- San Diego Academic Press 1996
- xiv, 291p.
0125330227
530.4106 / N63.21 "SER"
0125330227
530.4106 / N63.21 "SER"