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Characterization and metrology for ULSI technology. AIP Conference proceedings. Vol.683 (CD-ROM incl) ed by David G Seiler, et al. eds,

By: Contributor(s): Material type: TextTextSeries: AIP Conference proceedings. Vol.683Publication details: Melville American institute of physics 2003Description: xviii, 818p. incl. biblISBN:
  • 0735401527
Subject(s): DDC classification:
  • 621.38152 P033
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Item type Current library Call number Status Date due Barcode
Book Book JRD Tata Memorial Library 621.38152 P033 (Browse shelf(Opens below)) Available 172957

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