Characterization and metrology for ULSI technology. AIP Conference proceedings. Vol.683 (CD-ROM incl) (Record no. 140370)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0735401527 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | P033 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | International conference on characterization and metrology for ULSI technology (2003 |
| Numeration | Austin) |
| 245 ## - TITLE STATEMENT | |
| Title | Characterization and metrology for ULSI technology. AIP Conference proceedings. Vol.683 (CD-ROM incl) |
| Remainder of title | |
| Statement of responsibility, etc. | ed by David G Seiler, et al. eds, |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Melville |
| Name of publisher, distributor, etc. | American institute of physics |
| Date of publication, distribution, etc. | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xviii, 818p. |
| Other physical details | incl. bibl. |
| 490 ## - SERIES STATEMENT | |
| Series statement | AIP Conference proceedings. Vol.683 |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | ULSI Technology (Characterization); ULSI Technology (Metrology); American Institute of Physics |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Seiler, David G., ed. et al., |
| 919 ## - | |
| -- | 145724 |
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