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Handbook of plasma processing technology fundamentals, etching, deposition and surface interactions

Handbook of plasma processing technology fundamentals, etching, deposition and surface interactions ed. by Stephen M. Rossnagel, Jerome J. Cuomo, W. D. Westwood - Park Ridge Noyes publications 1990 - xxiii, 523p. - Materials science and process technology series .

ISBN: 0815512201

Dewey Class. No.: 621.044 / N90

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