Microelectronic test structures. ICMTS 1996. Proceedings (Record no. 66713)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0780327845 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381548 |
| Item number | N961 "SER" |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | IEEE International conference on microelectronic test structures (1996 |
| Numeration | Trento) |
| 245 ## - TITLE STATEMENT | |
| Title | Microelectronic test structures. ICMTS 1996. Proceedings |
| Remainder of title | |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New Jersey |
| Name of publisher, distributor, etc. | IEEE |
| Date of publication, distribution, etc. | 1996 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xi, 313p. |
| Dimensions | incl. bibl. |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Microelectronics; ICMTS 1996; IEEE: Electron Devices Society |
| 919 ## - | |
| -- | 069078 |
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