Microelectronic processing (Record no. 5722)
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000 -LEADER | |
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fixed length control field | 00604nam a2200193Ia 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0070542805 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.3815 |
Item number | N886 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Ruska, W. Scot. |
245 ## - TITLE STATEMENT | |
Title | Microelectronic processing |
Remainder of title | an introduction to the manufacture of integrated circuits |
Statement of responsibility, etc. | by W. Scot Ruska. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | New York |
Name of publisher, distributor, etc. | McGraw-Hill |
Date of publication, distribution, etc. | 1988 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xviii, 430p |
490 ## - SERIES STATEMENT | |
Series statement | McGraw-Hill series in electrical engineering |
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
Topical term or geographic name as entry element | Integrated circuits |
919 ## - | |
-- | 005785 |
964 ## - | |
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-- | 0 |
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-- | MRC |
Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Koha item type |
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Dewey Decimal Classification | Materials Research Centre | Materials Research Centre | 24/05/1996 | 621.3815 N886 | 149601 | Reference |