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Microelectronic processing an introduction to the manufacture of integrated circuits

Ruska, W. Scot.

Microelectronic processing an introduction to the manufacture of integrated circuits by W. Scot Ruska. - New York McGraw-Hill 1988 - xviii, 430p - McGraw-Hill series in electrical engineering .

ISBN: 0070542805

Dewey Class. No.: 621.3815 / N886

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