Fundamentals of microfabrication (Record no. 133061)

MARC details
000 -LEADER
fixed length control field 00604nam a2200193Ia 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0849308267
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
Item number P02 R(T)
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Madou, Mark J.
245 ## - TITLE STATEMENT
Title Fundamentals of microfabrication
Remainder of title science of miniaturization
Statement of responsibility, etc. by Mark J Madou
250 ## - EDITION STATEMENT
Edition statement 2nd ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Boca Raton
Name of publisher, distributor, etc. CRC press
Date of publication, distribution, etc. 2002
300 ## - PHYSICAL DESCRIPTION
Extent 723p.
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Microelectronics; Integrated circuits-design and construction; Microelectromechanical systems-design and construction;Machining; Microelectronic packaging; Lasers-industrial applications.
919 ## -
-- 138289
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Date acquired Cost, normal purchase price Total Checkouts Total Renewals Full call number Barcode Date due Date last seen Date last checked out Koha item type
        JRD Tata Memorial Library JRD Tata Memorial Library 02/12/2004 4991.42 3 2 621.38152 P02 R(T) 175170 18/06/2024 05/05/2024 05/05/2024 Book

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