Fundamentals of microfabrication (Record no. 133061)
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000 -LEADER | |
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fixed length control field | 00604nam a2200193Ia 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0849308267 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.38152 |
Item number | P02 R(T) |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Madou, Mark J. |
245 ## - TITLE STATEMENT | |
Title | Fundamentals of microfabrication |
Remainder of title | science of miniaturization |
Statement of responsibility, etc. | by Mark J Madou |
250 ## - EDITION STATEMENT | |
Edition statement | 2nd ed. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Boca Raton |
Name of publisher, distributor, etc. | CRC press |
Date of publication, distribution, etc. | 2002 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 723p. |
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
Topical term or geographic name as entry element | Microelectronics; Integrated circuits-design and construction; Microelectromechanical systems-design and construction;Machining; Microelectronic packaging; Lasers-industrial applications. |
919 ## - | |
-- | 138289 |
Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Cost, normal purchase price | Total Checkouts | Total Renewals | Full call number | Barcode | Date due | Date last seen | Date last checked out | Koha item type |
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JRD Tata Memorial Library | JRD Tata Memorial Library | 02/12/2004 | 4991.42 | 4 | 2 | 621.38152 P02 R(T) | 175170 | 06/07/2024 | 22/06/2024 | 22/06/2024 | Book |