Fundamentals of microfabrication (Record no. 133061)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0849308267 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | P02 R(T) |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Madou, Mark J. |
| 245 ## - TITLE STATEMENT | |
| Title | Fundamentals of microfabrication |
| Remainder of title | science of miniaturization |
| Statement of responsibility, etc. | by Mark J Madou |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boca Raton |
| Name of publisher, distributor, etc. | CRC press |
| Date of publication, distribution, etc. | 2002 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 723p. |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Microelectronics; Integrated circuits-design and construction; Microelectromechanical systems-design and construction;Machining; Microelectronic packaging; Lasers-industrial applications. |
| 919 ## - | |
| -- | 138289 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Cost, normal purchase price | Total Checkouts | Total Renewals | Full call number | Barcode | Date due | Date last seen | Date last checked out | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| JRD Tata Memorial Library | JRD Tata Memorial Library | 02/12/2004 | 4991.42 | 4 | 2 | 621.38152 P02 R(T) | 175170 | 06/07/2024 | 22/06/2024 | 22/06/2024 | Book |
