Fundamentals of microfabrication science of miniaturization
Madou, Mark J.
Fundamentals of microfabrication science of miniaturization by Mark J Madou - 2nd ed. - Boca Raton CRC press 2002 - 723p.
0849308267
621.38152 / P02 R(T)
Fundamentals of microfabrication science of miniaturization by Mark J Madou - 2nd ed. - Boca Raton CRC press 2002 - 723p.
0849308267
621.38152 / P02 R(T)