Normal view MARC view ISBD view

Developments in semiconductor micro lithography III; V.135

Ruddell, Richard L.

Developments in semiconductor micro lithography III; V.135 ed. by Richard L. Ruddell et al. - Washington SPIE 1978 - vi, 170p. - Proceeding of the Society of Photo-Optical Instrumentation Engineers V.135 .

V.135

ISBN: 0892521627

Dewey Class. No.: 621.367 / N782

Print
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)