| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a006337 | ||
| 020 | _a0878496440 | ||
| 082 |
_a530.416 _bN92 |
||
| 100 | _aed. by Van Rossum, Marc. | ||
| 245 | _aTrends in ion implantation /editor, Marc Van Rossum. | ||
| 260 |
_aZurich _bTrans. Tech. _c1992 |
||
| 300 | _a202p | ||
| 490 | _aSolid state phenomena, V.27 | ||
| 690 | _aIon implantation | ||
| 964 |
_a _b0 _c _d _e _f _g |
||
| 999 |
_c6266 _d6266 |
||