000 00551nam a2200145 4500
008 250313b |||||||| |||| 00| 0 eng d
020 _a0780317580
082 _a621.381
_bMIC
245 _aProceedings of the 1994 IEEE international conference on microelectronic test structures
260 _aCalifornia:
_bInstitute of electrical and electronics engineers, Inc.,
_c1994.
300 _axi, 224p.;
_bill.;
_c28 cm.
650 _aMicroelectronics
650 _aMicroelectronic circuits
942 _2ddc
_cG
999 _c433321
_d433321