| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a003361 | ||
| 020 | _a0815511531 | ||
| 082 |
_a621.3811 _bN881;1 |
||
| 245 |
_aHandbook of thin-film deposition processes and techniques _b _ced. by K. K. Schuegraj. |
||
| 260 |
_aPark Ridge _bNoyes _c1988 |
||
| 700 | _aSchuegraj, K. K., ed. | ||
| 964 |
_a _b0 _c _d _e _fED. _gISU |
||
| 999 |
_c3322 _d3322 |
||