| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a030749 | ||
| 082 |
_a621.381706 _bN68 "SER" |
||
| 100 |
_aIEEE International conference on microelectronic test structure (1968 _bSt. Louis) |
||
| 245 |
_aMicroelectronic test structure. ICMTS 1968. proceedings _b |
||
| 260 |
_aSt. Louis, USA _bIEEE _c1968 |
||
| 300 | _asectional | ||
| 690 | _aMicroelectronics; ICMTS 1968; IEEE electron devices society | ||
| 999 |
_c29126 _d29126 |
||