000 00604nam a2200193Ia 4500
919 _a025963
020 _a3540200568
082 _a621.356
_bP05
100 _aBasting, D., ed.
245 _aExcimer laser technology
_b
_ced by D Basting and G Marowsky
260 _aHeidelberg
_bSpringer-Verlag
_c2005
300 _axix, 433p.
690 _aLasers;
700 _aMarowsky, G., ed.
964 _a
_b
_c
_d
_e
_f
_gISU
999 _c24489
_d24489