| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a019896 | ||
| 020 | _a0892521627 | ||
| 082 |
_a621.367 _bN782 |
||
| 100 | _aRuddell, Richard L. | ||
| 245 |
_aDevelopments in semiconductor micro lithography III; V.135 _b _ced. by Richard L. Ruddell et al. |
||
| 260 |
_aWashington _bSPIE _c1978 |
||
| 300 | _avi, 170p. | ||
| 490 |
_aProceeding of the Society of Photo-Optical Instrumentation Engineers _vV.135 |
||
| 500 | _aV.135 | ||
| 690 | _aSemiconductors; Lithography | ||
| 700 | _aCiarlo, Dino. | ||
| 964 |
_a _b _c _d _e _fED. _g |
||
| 999 |
_c19343 _d19343 |
||