| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a165595 | ||
| 020 | _a1420045687 | ||
| 082 |
_a621.381 _bP083 |
||
| 100 | _aLiu, Ai-Qun | ||
| 245 |
_aPhotonic MEMS devices _bDesign, fabrication and control _cby Ai-Qun Liu |
||
| 260 |
_aBoca Raton _bCRC _c2008 |
||
| 300 | _a483p | ||
| 490 | _aOptical Science and Engineering | ||
| 690 | _aMicroelectromechanical devices; MEMS | ||
| 964 |
_a _b _c _d _e _f _gECE |
||
| 999 |
_c156665 _d156665 |
||