| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a153498 | ||
| 082 |
_a621.381 _bP063 "THESIS" |
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| 100 | _aSubrahmanyam, Gorthi V.R.M.S. | ||
| 245 |
_aCharacterization of electrostatic MEMS actuators beyond pull-in _b _cby Gorthi V R M S Subrahmanyam |
||
| 260 |
_aBangalore _bIISc _c2006 |
||
| 300 | _aix, 64p | ||
| 490 | _aIISc, Dept of SERC, MSc, Engg Thesis | ||
| 690 | _aMicroelectromechanical systems; Actuators; Dielectrics; Equilibrium; Dynamic stability | ||
| 999 |
_c147847 _d147847 |
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