000 00604nam a2200193Ia 4500
919 _a014875
082 _a621.395
_bN9011 "SER"
100 _aIEEE Symposium on VLSI technology (1990
_bHonolulu)
245 _aVLSI Technology
_bDigest of technical papers.
260 _aNew York
_bIEEE
_c1990
300 _axvii, 143p
_bincl. bibl.
690 _aVery Large Scale Integration; Japan Society of Applied Physics; IEEE Electron devices society;
964 _a
_b0
_c
_d
_e10TH.
_f
_g
999 _c14603
_d14603