| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a143360 | ||
| 020 | _a0780376536 | ||
| 082 |
_a621.381548 _bP03 "SER" |
||
| 100 |
_aIEEE International conference on microelectronic test stuctures (2003 _bMonterey) |
||
| 245 |
_aMicroelectronic test structures. ICMTS 2003. Proceedings _b |
||
| 260 |
_aPiscataway _bIEEE _c2003 |
||
| 300 |
_a249p. _bincl. bibl. |
||
| 690 | _aICMTS 2003; Microelectronics; IEEE Electron devices society; | ||
| 999 |
_c138050 _d138050 |
||