| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a139073 | ||
| 020 | _a0125249756 | ||
| 082 |
_a621.38152 _bP023 |
||
| 100 | _aOhring, Milton | ||
| 245 |
_aMaterials science of thin films deposition and structure _b _cby Milton Ohring |
||
| 250 | _a2nd ed. | ||
| 260 |
_aSan Diego _bAcademic Press _c2002 |
||
| 300 | _axxi, 794p. | ||
| 690 | _aThin films-material science; Thin films-structure; Vapour-plating | ||
| 964 |
_a _b _c _d _e _f _gMET |
||
| 999 |
_c133814 _d133814 |
||