| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a138601 | ||
| 020 | _a0125330308 | ||
| 082 |
_a530.4105 _bN63.30 "SER" |
||
| 245 |
_aThin films and nanostuctures. Vol.30 _bAdvances in plasma-grown hydrogenated films _ced by Maurice H.Francombe |
||
| 260 |
_aSan Diego _bAcademic Press _c2002 |
||
| 300 |
_ax, 280p. _bincl. bibl. |
||
| 690 | _aNanostructures; PECVD (Plasma-enhanced chemical vapour deposition); Plasma-grown hydrogenated films | ||
| 700 | _aFrancombe, Maurice H., ed. | ||
| 904 | _aAdvances in plasma-grown hydrogenated films | ||
| 999 |
_c133356 _d133356 |
||