000 | 00604nam a2200193Ia 4500 | ||
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919 | _a136813 | ||
020 | _a0780365119 | ||
082 |
_a621.381548 _bP011 "SER" |
||
100 |
_aInternational conference on microelectronic test structures (14 _b2001 _bKobe) |
||
245 |
_aMicroelectronic test structures. ICMTS 2001. Proceedings _b |
||
260 |
_aPiscataway _bIEEE _c2001 |
||
300 |
_ax, 271p. _bincl. bibl. |
||
690 | _aICMTS 2001; Microelectronics; IEEE Electron devices society | ||
999 |
_c131602 _d131602 |