000 00604nam a2200193Ia 4500
919 _a136813
020 _a0780365119
082 _a621.381548
_bP011 "SER"
100 _aInternational conference on microelectronic test structures (14
_b2001
_bKobe)
245 _aMicroelectronic test structures. ICMTS 2001. Proceedings
_b
260 _aPiscataway
_bIEEE
_c2001
300 _ax, 271p.
_bincl. bibl.
690 _aICMTS 2001; Microelectronics; IEEE Electron devices society
999 _c131602
_d131602