| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a013385 | ||
| 020 | _a0879427140 | ||
| 082 |
_a621.381548 _bN891 "SER" |
||
| 100 |
_aIEEE International conference on microelectronic test structures (1989 _bEdinburgh) |
||
| 245 |
_aMicroelectronic test structure. ICMTS 1989. Proceedings. _b |
||
| 260 |
_aNew York _bIEEE _c1989 |
||
| 300 | _axii, 265p. | ||
| 690 | _aMicroelectronics; ICMTS 1989; IEEE Electron Devices Society | ||
| 964 |
_a _b0 _c _d _e _f _g |
||
| 999 |
_c13153 _d13153 |
||