| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a128824 | ||
| 020 | _a0780344138 | ||
| 082 |
_a621.381 _bN981 "SER" |
||
| 100 |
_aWorkshop on micro electro mechanical systems(11 _b1998 _bHeidelberg) |
||
| 245 |
_aMEMS 98 _bProceedings |
||
| 260 |
_aPiscataway _bIEEE _c1998 |
||
| 300 |
_axxx, 666p. _cincl. bibl. |
||
| 690 | _aMEMS 98; Microelectronics; Investigation of micro structures, sensors, actuators, machines and systems; Millimeter-scale systems-analysis, design, fabrication, operation and application | ||
| 999 |
_c124003 _d124003 |
||