| 000 | 00604nam a2200193Ia 4500 | ||
|---|---|---|---|
| 919 | _a117682 | ||
| 010 | _a64-24105 | ||
| 082 |
_a621.55 _bN65 |
||
| 100 | _aLewin, Gerhard | ||
| 245 |
_aFundamentals of vacuum science and technology _b _cby Gerhard Lewin |
||
| 260 |
_aNew York _bMcGraw-Hill _c1965 |
||
| 300 |
_axiii, 848p. _cincl. index |
||
| 690 | _aVacuum technology | ||
| 999 |
_c113276 _d113276 |
||