000 00604nam a2200193Ia 4500
919 _a116839
082 _a621.38171
_bN65;1
100 _aHolland, L., ed.
245 _aThin film microelectronic the preparation and properties of components and circuit arrays
_b
_ced. by L. Holland.
260 _bChapman
_c1965
999 _c112463
_d112463