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	1.	Microelectro mechanical systems. MEMS 1994 Proceedings by IEEE Workshop on Micro Electro Mechanical Systems (7: 1994: Oiso) Material type: Text Publication details: New Jersey IEEE 1994 Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (1)Call number: 621.381 N944 "SER".
	2.	MEMS-97 Proceedings by Workshop on micro electro mechanical systems(10 1997 Nagoya) Material type: Text Publication details: Piscataway IEEE 1997 Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (1)Call number: 621.381 N974 "SER".
	3.	MEMS'99 digest by International micro electro mechanical systems conference (12 1999 Orlando) Material type: Text Publication details: Piscataway IEEE 1999 Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (1)Call number: 621.381 N991 "SER".
	4.	MEMS 2000 Proceedings. by IEEE international conference on micro electro mechanical systems (13 2000 Miyazaki) Material type: Text Publication details: Piscataway IEEE 2000 Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (1)Call number: 621.381 P1 "SER".
	5.	Micro electro mechanical systems Technical Digest by IEEE International conference on micro electro mechanical systems(15 2002 Las Vegas) Material type: Text Publication details: Piscataway IEEE 2002 Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.381 P02 "SER". Place hold

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