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High vacuum production in the microelectronics industry by Pierre Duval.

By: Material type: BookBookSeries: Plasma technology ed. by L. Holland ; 2Publication details: Amsterdam Elsevier 1988Description: xiii, 222pISBN:
  • 0444424695
Subject(s): DDC classification:
  • 621.55 N88
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Holdings
Item type Current library Call number Status Date due Barcode
Book Book JRD Tata Memorial Library 621.55 N88 (Browse shelf(Opens below)) Available 143030

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