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1.
Plasma etching an introduction ed. by Dennis M. Manos and Daniel L. Flamm. by
  • Manos, Dennis M., ed
  • Flamm, Daniel L., ed
Series: Plasma-Materials interactions
Material type: Text Book
Publication details: Boston Academic press 1989
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 530.44 N89.

2.
Plasma diagnostics V.2:Surface analysis and interactions ed. by Orlando Auciello, Daniel L Flamm by
  • Auciello, Orlando., ed
  • Flamm, Daniel L., ed
Series: Plasma-materials interactions
Material type: Text Book
Publication details: Boston Academic press 1989
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 530.44 N8911.2.

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