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Deposition and growth limits for microelectronic ed. by G. W. Rubloff.

By: Contributor(s): Material type: TextTextSeries: American Institute of Physics. Conference Proceedings No.167Publication details: New York American Institute of Physics 1988Description: vii, 388pISBN:
  • 0883183676
Subject(s): DDC classification:
  • 537.622 N883
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Item type Current library Call number Status Date due Barcode
Reference Reference JRD Tata Memorial Library 537.622 N883 (Browse shelf(Opens below)) Not for loan 141909

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