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Characterization and metrology for ULSI technology 2000. Vol.550 (CD-ROM included) ed. by David G. Seiler et al by Series: AIP Conference proceedings. Vol. 550
Material type: Text Text
Publication details: Melville American Institute of Physics 2001
Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (1)Call number: 621.38152 P01.

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Characterization and metrology for ULSI technology ed by David G. Seiler, et al., by Series: AIP Conference proceedings. Vol.788
Material type: Text Text
Publication details: Melville American institute of physics 2005
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.38152 P05.

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Frontiers of Characterization and Metrology for Nanoelectronics ed by David G. Seiler, et al., by Series: AIP Conference Proceedings. Vol.931
Material type: Text Text
Publication details: Melville American Institute of Physics 2007
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.3815 P07.

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