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	1.	No cover image available Handbook of microlithography, micromachining, and microfabrication - V.1-2 ed. by P. Rai-Choudhury by Rai-Choudhury, P., ed Series: IEE Materials and devices series, 12, 12B Material type: Text Publication details: Washington SPIE/IEE 1997 Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (2)Call number: 621.381531 N97.1-N97.2 "R", ...
	2.	MEMS and MOEMS technology and applications ed by P. Rai-Choudhury by Rai-Choudhury, P., ed Material type: Text Publication details: Washington The Society of Photo-Optical Instrumentation Engineers 2000 Availability: Items available for loan: Electrical Communication Engineering (1)Call number: 621.381 P001. Place hold
	3.	MEMS and MOEMS technology and applications ed by P Rai-Choudhury by Rai-Choudhury, P., ed Series: SPIE press monograph ; Volume PM85 Material type: Text Publication details: Washington Springer 2000 Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.381 P001;1. Place hold

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