Thin films; V.26 PVD for microelectronics:Sputter deposition applied to semiconductor manufacturing by Ronald A. Powel, Stephen M. Rossnagel

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Material type: Text

TextPublication details: San Diego Academic Press 1999Description: xiii, 419p. incl. biblISBN:

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Item type	Current library	Call number	Status	Date due	Barcode
S	JRD Tata Memorial Library	530.4105 N63.26 "SER" (Browse shelf(Opens below))	Available		163052

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