Thin films; V.26 PVD for microelectronics:Sputter deposition applied to semiconductor manufacturing by Ronald A. Powel, Stephen M. Rossnagel
Material type:
- 012533026X
- 530.4105 N63.26 "SER"
Item type | Current library | Call number | Status | Date due | Barcode | |
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JRD Tata Memorial Library | 530.4105 N63.26 "SER" (Browse shelf(Opens below)) | Available | 163052 |
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