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	1.	Fundamentals of Microfabrication The Science of Miniaturization by Marc J Madou by Madou Marc, J Edition: 2nd Material type: Text Publication details: Boca Rato CRC Press 2002 Availability: Items available for loan: Centre for Nano Science and Engineering (1)Call number: 621.38152 P02;1 (CeNSE). Place hold
	2.	Fundamentals of microfabrication and nanotechnology. Vol.1 Solid-state physics, fluidics and analytical techniques in micro and nanotechnology by Marc J. Madou by Madou, Marc J Edition: 3rd ed Material type: Text Publication details: Taylor and Francis Group 2012 Availability: Items available for loan: Centre for Nano Science and Engineering (1)Call number: 620.5 P121.1 (CeNSE). Place hold
	3.	Fundamentals of microfabrication and nanotechnology. Vol.2 Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J Madou by Madou, Marc J Series: Manufacturing Techniques for Microfabrication and Nanotecy Edition: 3rd ed Material type: Text Publication details: Taylor and Francis Group 2012 Availability: Items available for loan: Centre for Nano Science and Engineering (1)Call number: 620.5 P121.2 (CeNSE). Place hold
	4.	Fundamentals of microfabrication and nanotechnology. Vol.3 From MEMS ti Bio-MEMS and Bio-NEMS manufacturing Techniques and Applications by Marc J. Madou by Madou, Marc J Edition: 3rd ed Material type: Text Publication details: Taylor and Francis Group 2012 Availability: Items available for loan: Centre for Nano Science and Engineering (1)Call number: 620.5 P121.3 (CeNSE). Place hold

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