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1.
Hand Book of silicon based mems materials and technologies by Veikko Lindroos, et al by
Material type: Text Text
Publication details: Amsterdam Elsevier 2010
Availability: Items available for reference: JRD Tata Memorial Library: Not for loan (1)Call number: 621.381 P101 'R'.

2.
Handbook of silicon based MEMS materials and technologies ed by Markku Tilli and Teruki Motooka., et.al by
Edition: 2nd ed
Material type: Text Text
Publication details: London Elsevier 2015
Availability: Items available for loan: Centre for Nano Science and Engineering (1)Call number: 621.38152 P15 (CeNSE).

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