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		CMOS-MEMS by Brand, Oliver,. ed, Fedder, Gray K,. ed Material type: Text Publication details: Germany Wiley-VCH 2013 Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.3815 P132. Place hold
		Enabling tehnologies for MEMS and nanodevices Advanced micro and nanosystems by Baltes, Henry,. ed, Brand, Oliver,. ed Fedder, Gray K,. ed al Material type: Text Publication details: Germany Wiley-VCH 2013 Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 620.5 P138. Place hold

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