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1.
Silicon Processing for the VLSI Era Vol.1 Process Technology by Stanley Wolf and Richard N Tauber by
  • Wolf, Stanley
  • Tauber, Richard N
Material type: Text Book
Publication details: California Lattice Press 2000
Availability: Items available for loan: Centre for Nano Science and Engineering (1)Call number: 621.395 P001.1 (CeNSE).

2.
Silicon Processing for the VLSI Era-Vol.2 Process Integration by Stanley Wolf by
  • Wolf, Stanley
Material type: Text Book
Publication details: California Lattice Press 1990
Availability: Items available for loan: Centre for Nano Science and Engineering (1)Call number: 621.395 N9013.2 (CeNSE).

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