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Semiconductor silicon materials science and technology - Proceedings ed. by G. Harbeke, M.J.Schulz by Series: Springer series in materials science ; 13
Material type: Text Text
Publication details: Berlin Springer-Verlag 1989
Availability: Items available for loan: JRD Tata Memorial Library (1)Call number: 621.38152 N893.

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2.
Handbook of silicon based MEMS materials and technologies ed by Markku Tilli and Teruki Motooka., et.al by
Edition: 2nd ed
Material type: Text Text
Publication details: London Elsevier 2015
Availability: Items available for loan: Centre for Nano Science and Engineering (1)Call number: 621.38152 P15 (CeNSE).

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