TY  - BOOK
AU  - Boyd, Ian W.
TI  - Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators
T2  - Springer series in material science
SN  - 3540179518
U1  - 621.366 
PY  - 1987///
CY  - Berlin
PB  - Springer-Verlag
ER  -