Boyd, Ian W. <br/><br/>
Laser processing of thin films and microstructures  oxidation, deposition and etching of insulators 
by Ian W.Boyd 
 - Berlin  Springer-Verlag  1987 
 - viii, 320p. 
 - Springer series in material science  V.3 .
<br/><br/><label>ISBN: </label>3540179518 
<br/><br/><label>Dewey Class. No.: </label>621.366  / N876